Abbildungsvorrichtung und Verfahren zum Ausrichten von Bildern

Details

Veröffentlichungs-Nr.

EP4293408

Aktenzeichen

EP22178948

Anmeldetag

14. Juni 2022

Veröffentlichung

20. Dezember 2023

Rechtsraum

EP

IPC

G02B21/36G02B27/10G02B21/24G02B21/16G02B21/26G06T7/10G06T7/30

Abstract

An imaging device (100) comprises a detection optics (108) configured to receive detection light from a sample (102), and to direct the detection light into a main beam path (110). The imaging device (100) also comprises a beam splitting element (112) configured to be inserted into the main beam path (110), to direct a first part of the detection light into a first branched beam path (114), and to direct a second part of the detection light into a second branched beam path (116). At least one first filter element (122) is configured to be inserted into the first branched beam path (114). A first detector element (120) is arranged in the first branched beam path (114), and configured to capture at least a first test image when the beam splitting element (112) is inserted into the main beam path (110) and the first filter element (122) is not inserted into the first branched beam path (114), a third test image the first filter element (122) is inserted into the first branched beam path (114), and a first actual image. At least one second filter element (128) is configured to be inserted into the second branched beam path (116). A second detector element (126) is arranged in the second branched beam path (116), and configured to capture at least a second test image when the beam splitting element (112) is inserted into the main beam path (110) and the second filter element (128) is not inserted into the second branched beam path (116), a fourth test image when the second filter element (128) is inserted into the second branched beam path (116), and a second actual image. The imaging device (100) further comprises a controller (130) configured to determine a first misalignment between the first test image and the second test image, a second misalignment between the third test image and the first test image, and a third misalignment between the fourth test image and the second test image; and to align the first actual image and the second actual image based on the first misalignment, the second misalignment, and the third misalignment.

Anmelder

Firma

Leica Microsystems CMS GmbH

Land

🇩🇪 Deutschland

Fachgebiete