Verfahren zum Ausrichten eines Beleuchtungsdetektionssystems einer Messvorrichtung und Zugehörige Messvorrichtung

Details

Veröffentlichungs-Nr.

EP4296779

Aktenzeichen

EP22180144

Anmeldetag

21. Juni 2022

Veröffentlichung

27. Dezember 2023

Rechtsraum

EP

IPC

G03F7/20G01N23/201

Abstract

Disclosed is a method of determining an illumination-detection system alignment of an illumination-detection system describing alignment of at least one detector and/or measurement illumination of a metrology apparatus in terms of two or more illumination-detection system alignment parameters, each illumination-detection system alignment parameter relating to a respective degree of freedom for aligning the detector and/or the measurement illumination. The method comprises obtaining a diffraction pattern relating to diffraction of broadband radiation from a structure; transforming each of one or more diffraction orders of the diffraction pattern to a respective region coordinate system, each region coordinate system comprising a first axis and a second axis, each region coordinate system being such that said first axis is aligned in relation to a direction of an intensity metric of each transformed diffraction order; and determining illumination-detection system alignment parameter values for the illumination-detection system alignment parameters.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete