Synchronisiertes Massengyroskop mit Voller Symmetrie und Drehbarkeit

Details

Veröffentlichungs-Nr.

EP4300039

Aktenzeichen

EP23168935

Anmeldetag

20. April 2023

Veröffentlichung

25. Juni 2025

Erteilung

25. Juni 2025

Rechtsraum

EP

IPC

G01C19/5726G01C19/5733

Abstract

A gyroscope includes a substrate, a proof mass coupled to the substrate and configured to move in direction of an X axis and in direction of a Y axis orthogonal to the first axis, an X axis shuttle to selectively drive the proof mass along the X axis as a drive axis or sense movement of the proof mass along the X axis as a sense axis in response to the proof mass driven along the Y axis as the drive axis, and a Y axis shuttle to selectively sense movement of the proof mass along the Y axis as a sense axis in response to the proof mass driven along the X axis or drive the proof mass along the Y axis as the drive axis. The X axis shuttle is symmetric to the Y axis shuttle along a diagonal axis that is diagonal to both the X axis and the Y axis. The X and Y axis shuttles have gaps designed for a predetermined DC voltage to generate spring softening (negative cubic nonlinearity) that is equal to spring hardening (positive cubic nonlinearity), ensuring linear motion at high amplitudes (1/3 of the capacitive gap).

Anmelder

Firma

Analog Devices, Inc.

Land

🇺🇸 USA

Fachgebiete