Verfahren und Geräte für die Fourier-Transformationsspektrometrie

Details

Veröffentlichungs-Nr.

EP4312005

Aktenzeichen

EP22187745

Anmeldetag

29. Juli 2022

Veröffentlichung

31. Januar 2024

Rechtsraum

EP

IPC

G01J3/02G01J3/453G01J3/36

Abstract

Disclosed is a Fourier-transform spectrometer comprising a beamsplitting arrangement operable to define a first radiation source and a second radiation source from a common radiation source, and at least one detector operable to detect interferogram data as a function of detection position in at least a first detection plane direction of a detection plane, the interferogram data resulting from interference of a first diverging beam emitted from said first radiation source and a second diverging beam emitted from said second radiation source. A processor is operable to:perform a linearization correction to said interferogram data to obtain linearized interferogram data; and Fourier transform the linearized interferogram data to obtain spectral characteristic data relating to the common radiation source.

Anmelder

Firmen

Stichting VU
Stichting Nederlandse Wetenschappelijk Onderzoek Instituten
Universiteit van Amsterdam
Rijksuniversiteit Groningen
ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete