Verfahren zur Automatisierten Datenerfassung für ein Transmissionselektronenmikroskop

Details

Veröffentlichungs-Nr.

EP4345447

Aktenzeichen

EP22199178

Anmeldetag

30. September 2022

Veröffentlichung

3. April 2024

Rechtsraum

EP

IPC

G01N23/2251H01J37/26

Abstract

A method of automated data acquisition for a transmission electron microscope, the method comprising: obtaining a reference image of a sample at a first magnification; for each of a first plurality of target locations identified in the reference image: steering an electron beam of the transmission electron microscope to the target location, obtaining a calibration image of the sample at a second magnification greater than the first magnification, and using image processing techniques to identify an apparent shift between an expected position of the target location in the calibration image and an observed position of the target location in the calibration image, training a non-linear model using the first plurality of target locations and the corresponding apparent shifts; based on the non-linear model, calculating a calibrated target location for a next target location; steering the electron beam to the calibrated target location and obtaining an image at a third magnification greater than the first magnification.

Anmelder

Firma

FEI COMPANY

Land

🇺🇸 USA

Fachgebiete