Verfahren zum Betreiben eines Detektionssystems einer Metrologievorrichtung und Zugehörige Metrologievorrichtung

Details

Veröffentlichungs-Nr.

EP4354224

Aktenzeichen

EP22200780

Anmeldetag

11. Oktober 2022

Veröffentlichung

17. April 2024

Rechtsraum

EP

IPC

G03F7/20H04N25/443

Abstract

Disclosed is a method of reading out a detection arrangement, said detection arrangement defining a detection area in terms of plurality of pixels. The method comprises receiving scattered radiation on said detection arrangement; dividing the detection area into at least two different regions of interest based at least on a measurement parameter of said scattered radiation; and employing a respective different readout scheme for each said regions of interest, so as to read out said detection arrangement.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete