Mikroelektromechanisches Gyroskop mit Erfassung der Winkelgeschwindigkeit Entlang einer Vertikalen Achse

Details

Veröffentlichungs-Nr.

EP4361560

Aktenzeichen

EP23202344

Anmeldetag

9. Oktober 2023

Veröffentlichung

18. Februar 2026

Erteilung

18. Februar 2026

Rechtsraum

EP

IPC

G01C19/5762G01C19/5747

Abstract

A microelectromechanical gyroscope (10) with detection along a vertical axis is provided with a detection structure (10) having a movable structure (12), suspended above a substrate (13) so as to perform, as a function of an angular velocity (Ω<z>) around the vertical axis a sense movement along a first horizontal axis (x). The movable structure has at least one drive mass (14) internally defining a window (16), elastically coupled to a rotor anchor (20'), at an anchoring region (A), through elastic anchoring elements (21); at least one bridge element (18), rigid and of a conductive material, cantilevered suspended and extending within the window along the first horizontal axis, elastically coupled to the drive mass; movable electrodes (23), carried integrally by the bridge element with extension along a second horizontal axis (y). The detection structure (10) also has stator electrodes (28, 29), arranged in the window and interdigitated with the movable electrodes, at a certain separation distance below the bridge element (18), which extends longitudinally above the same stator electrodes and the movable electrodes.

Anmelder

Firma

STMicroelectronics S.r.l.

Land

🇮🇹 Italien

Fachgebiete