System zur Bildung von Mikrostrukturen in Polymermaterialien mit Piezoelektrischem 2D-Antrieb

Details

Veröffentlichungs-Nr.

EP4368565

Aktenzeichen

EP22212145

Anmeldetag

8. Dezember 2022

Veröffentlichung

19. März 2025

Erteilung

19. März 2025

Rechtsraum

EP

IPC

B81C99/00B29C59/02B29C59/00// B06B3/00B06B1/02B06B1/06

Abstract

The system according to the invention includes a vibrator (1), a matrix (2) fixed at the free end, an excitation-control generator (3), a polymer material workpiece (4) fixed in a tray (5), which is connected to a precision positioning drive (6) controlled from the excitation-control generator (3). High-frequency mechanical vibrations are excited in the matrix (2), and the pressure to the polymer material workpiece (4) according to the set technological mode forms a microstructure corresponding to the shape of the matrix (2). In order to change the microstructure in the polymer material workpiece (4), positioning of the workpiece (4) is performed according to the set program from the excitation-control generator (3). Thus, with the same matrix (2) by positioning in the plane according to the set program, it is possible to prepare a dozen variants of microstructures, i.e., MEMS elements.

Anmelder

Firma

Kaunas University of Technology

Land

🇱🇹 Litauen

Fachgebiete