Elektrostatische Klemme, Greiferanordnung mit Dieser Klemme, Lithographisches System mit einer Elektrostatischen Klemme und Verfahren zur Herstellung einer Elektrostatischen Klemme

Details

Veröffentlichungs-Nr.

EP4379783

Aktenzeichen

EP22210278

Anmeldetag

29. November 2022

Veröffentlichung

5. Juni 2024

Rechtsraum

EP

IPC

H01L21/683H01L21/687

Abstract

The disclosure provides an electrostatic clamp for clamping an object, comprising: an electrode layer; a first isolating layer comprising an electrically isolating flexible material arranged on top of the electrode layer, the first isolating layer having a first thickness; a first shielding layer comprising an electrically conductive material arranged on top of the first isolating layer, the first shielding layer having a first shielding thickness and a cut-out pattern for exposing the electrode layer covered with the first isolating layer; and a number of burls of at least 1 µm tall arranged on top of the first shielding layer at the location of the cut-out pattern.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete