Inertialsensorarchitektur mit Symmetrischem Messmodus und Verbesserter Immunität gegen Quadratureffekte

Details

Veröffentlichungs-Nr.

EP4382861

Aktenzeichen

EP22315317

Anmeldetag

8. Dezember 2022

Veröffentlichung

20. August 2025

Erteilung

20. August 2025

Rechtsraum

EP

IPC

G01C19/5747

Abstract

The invention relates to an inertial sensor (1) comprising a substrate (2), sense frames (210, 220), drive frames (110, 120) configured to put into motion the sense frames, and a sense lever (300) pivotably mounted around a rotation axis (7). The sense frames, drive frames and sense lever are connected to each other by elastically means in such a way that when the inertial sensor is subjected to a rotational movement around the rotation axis, the first sense frame, the second sense frame and the sense lever respectively feature a first tilt θ<1> a second tilt θ<2> and a lever tilt θ<S> relatively to the device plane, and both θ<1>/θ<S> and θ<2>/θ<S> are lower than 0.1. The inertial sensor features strain gauges that get stressed when the lever rotates due to the motion of the sense frames.

Anmelder

Firmen

Commissariat à l'Energie Atomique et aux Energies Alternatives
Politecnico di Milano
Commissariat à l'énergie atomique et aux énergies alternatives

Land

🇫🇷 Frankreich

Fachgebiete