Aufnahme und Platzierung auf Aussparungsbasis für Heterogene Integration

Details

Veröffentlichungs-Nr.

EP4394851

Aktenzeichen

EP22217347

Anmeldetag

30. Dezember 2022

Veröffentlichung

3. Juli 2024

Rechtsraum

EP

IPC

H01L21/67H01L21/677

Abstract

An apparatus for die placement comprising a first stage comprising a plurality of recesses, the plurality of recesses configured to accept a plurality of donor dies; a second stage comprising a support for one or more targets; and a measurement system, functionally coupled to the first stage, and configured to: obtain locations of the plurality of donor dies in the plurality of recesses of the first stage, and based at least on the obtained locations, provide output signals to adjust the locations of the plurality of donor dies supported by the first stage to correspond to locations of the one or more targets, and based at least in part on the adjusted locations, provide output signals to place the plurality of donor dies on the one or more targets supported by the second stage by relative movement between the first stage and the second stage.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete