Elektronenmikroskop, Aberrationskorrekturverfahren und Bildgebungsverfahren

Details

Veröffentlichungs-Nr.

EP4415021

Aktenzeichen

EP24156063

Anmeldetag

6. Februar 2024

Veröffentlichung

5. März 2025

Erteilung

5. März 2025

Rechtsraum

EP

IPC

H01J37/22

Abstract

An electron microscope (100) includes an electron optical system (20, 40), and a control unit (60) that controls the electron optical system (20, 40), the control unit (60) performing: processing for determining a standard deviation of a brightness distribution of an electron microscope image; processing for determining an optimum value of a parameter of the electron optical system (20, 40) such that the standard deviation becomes the maximum, by Gaussian process regression; and processing for capturing the electron microscope image with setting a value of the parameter to the optimum value, and the control unit (60) repeating the processing for determining the standard deviation, the processing for determining the optimum value, and the processing for capturing the electron microscope image to determine a value of the parameter.

Anmelder

Firmen

JEOL Ltd.
Jeol Ltd.

Land

🇯🇵 Japan

Fachgebiete