Vorrichtung zur Kontrolle von Eingefangenen Ionen

Details

Veröffentlichungs-Nr.

EP4432307

Aktenzeichen

EP23162496

Anmeldetag

17. März 2023

Veröffentlichung

18. September 2024

Rechtsraum

EP

IPC

G21K1/00H01J37/04

Abstract

A device (300) for controlling trapped ions (180) includes a substrate. A metal layer is disposed over the substrate (120). An electrode (125, M3) of an ion trap is disposed over the metal layer (135, M2), wherein the electrode is configured to trap one or more ions in a space above the electrode. An electrical insulator (130) is disposed between the metal layer and the electrode. The electrical insulator comprises an upper surface facing towards the electrode and a lower surface facing towards the metal layer. An etching rate of the electrical insulator increases along a direction pointing from the upper surface to the lower surface.

Anmelder

Firma

Infineon Technologies Austria AG

Land

🇦🇹 Österreich

Fachgebiete