Translationsmassenbeschleunigungsmesser

Details

Veröffentlichungs-Nr.

EP4474830

Aktenzeichen

EP24176255

Anmeldetag

16. Mai 2024

Veröffentlichung

11. Dezember 2024

Rechtsraum

EP

IPC

G01P15/125G01P15/13B81C1/00// G01P15/08

Abstract

An example Micro Electro-Mechanical Systems (MEMS) accelerometer device includes a proof mass comprising at least one of one or more isolated conductive coil traces or one or more pick-off combs within the proof mass, the one or more pick-off combs comprising a plurality of pick-off comb tines; a pole-piece layer coupled to the proof mass; and a return-path layer coupled to the proof mass, wherein the at least one of the one or more isolated conductive coil traces or the one or more pick-off combs are formed by selective laser etching.

Anmelder

Firma

Honeywell International Inc.

Land

🇺🇸 USA

Fachgebiete