Objektträger mit Reversibel Veränderbarem Kristallinem/amorphem Phasenmaterial zu Selektiver Veränderung der Höhe Individueller Stützelemente, Entsprechendes Herstellungsverfahren und Entsprechende Verwendung

Details

Veröffentlichungs-Nr.

EP4488759

Aktenzeichen

EP23183512

Anmeldetag

5. Juli 2023

Veröffentlichung

8. Januar 2025

Rechtsraum

EP

IPC

G03F7/20H01L21/687

Abstract

There is provided an object holder configured to support an object, the object holder comprising a support surface having a plurality of support elements, wherein the plurality of support elements comprise a reversibly changeable crystalline/amorphous phase material configured to provide a selectively changeable height of individual support elements. Also provided is an object table comprising such an object holder, An apparatus for controlling the flatness of a surface comprising such an object holder, a lithographic apparatus or tool comprising such an object holder, a method of controlling the shape of a surface, a method of manufacturing an object holder, and the use of such apparatuses or method in a lithographic apparatus or process.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete