Vorrichtung zur Wellenlängenaufgelösten Strahlüberwachung

Details

Veröffentlichungs-Nr.

EP4492140

Aktenzeichen

EP23184336

Anmeldetag

10. Juli 2023

Veröffentlichung

15. Januar 2025

Rechtsraum

EP

IPC

G03F7/00G01J3/18G01J3/32

Abstract

System an apparatus for wavelength resolved beam profiling. The apparatus comprises a beam monitoring assembly configured to receive a radiation beam comprising a plurality of wavelengths, and to provide a diffracted radiation of the plurality of wavelengths, wherein each of the plurality of wavelengths is spatially separated in the diffracted radiation. The apparatus comprises a color selector configured to select a portion of the diffracted radiation. The apparatus comprises a detector configured to detect the selected diffracted radiation and to generate beam profile data of the selected radiation. The color selector is movable to select each of the plurality of diffracted wavelengths of the diffracted radiation such that the plurality of wavelengths do not overlap when incident on the detector.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete