Lichtstrahlcharakterisierungssystem

Details

Veröffentlichungs-Nr.

EP4528237

Aktenzeichen

EP23199001

Anmeldetag

22. September 2023

Veröffentlichung

18. Februar 2026

Erteilung

18. Februar 2026

Rechtsraum

EP

IPC

G01J1/42

Abstract

A light beam characterization system (100) for characterizing a light beam emitted by a light source (102) is disclosed. The light beam characterization system (100) comprises a detector device (108) comprising at least one detector unit (110, 112) configured to detect the light (L), and a micro-opto-electromechanical system (104) comprising an array of mirrors (106). Each mirror (106) is switchable between a first switching state, in which the mirror (106) reflects the light onto the detector device (108), and at least a second switching state, in which the mirror (106) reflects the light (L) away from the detector device (108). A controller (114) is configured to cause a beam profile measurement to be performed on the light (L) detected by the at least one detector unit (110, 112) while selectively switching the mirrors (106) between the first and second switching states. The light beam characterization system (100) further comprises an optical unit (116) configured to direct the light (L) in form of at least two different input light beams (L1, L2) onto the micro-opto-electromechanical system (104). The controller (114) is configured to cause the beam profile measurement to be performed on each of the at least two input light beams (L1, L2).

Anmelder

Firma

Leica Microsystems CMS GmbH

Land

🇩🇪 Deutschland

Fachgebiete