Verfahren zur Spektralen Konfiguration der Messbeleuchtung eines Messwerkzeugs und Zugehörige Vorrichtungen

Details

Veröffentlichungs-Nr.

EP4530717

Aktenzeichen

EP23199669

Anmeldetag

26. September 2023

Veröffentlichung

2. April 2025

Rechtsraum

EP

IPC

G03F7/00G03F9/00G02B27/10G02B5/18G02B26/08

Abstract

Disclosed is a method of spectrally configuring measurement illumination of a metrology tool, the method comprising: projecting measurement radiation using a projection optical system to obtain projected measurement radiation; measuring a signal amplitude metric of said projected measurement radiation at a detector; determining a spectral shape of the projected measurement radiation from the signal amplitude metric; and spectrally configuring the measurement illumination before the projection optical system to adjust said spectral shape to match a desired spectral shape.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete