Seitenwandwinkelmetrologie

Details

Veröffentlichungs-Nr.

EP4550047

Aktenzeichen

EP23207692

Anmeldetag

3. November 2023

Veröffentlichung

7. Mai 2025

Rechtsraum

EP

IPC

G03F7/00

Abstract

There is provided a method for determining angular information of one or more structures comprising: illuminating a first surface portion of said one or more structures with an illumination beam and measuring radiation scattered therefrom to determine a first signal; determining a first asymmetry metric value describing degree of asymmetry of the first signal; and determining the angular information based on at least the first asymmetry metric value, wherein the illumination beam comprises a spot size smaller in at least one dimension of a smallest element of the first surface portion.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete