Verfahren zur Herstellung von Elektroden

Details

Veröffentlichungs-Nr.

EP4567152

Aktenzeichen

EP23215275

Anmeldetag

8. Dezember 2023

Veröffentlichung

11. Juni 2025

Rechtsraum

EP

IPC

C23F4/04C25F3/14G01N27/02H01L21/3213// G01N33/00

Abstract

The present invention relates to a method for manufacturing a plurality of electrodes (15) wherein the electrodes (15) comprise noble metal, the method comprising: a. providing a substrate (10) having a dielectric layer (11) in physical contact therewith, wherein the dielectric layer (11) comprises at least a sacrificial part (12), wherein the sacrificial part (12) comprises a top surface (121), b. forming a conductive layer (13) on the dielectric layer (11) and in physical contact with the top surface (121) of the sacrificial part (12), wherein the conductive layer (13) comprises the noble metal, thereafter c. providing a masking layer (14) over the conductive layer (13), thereafter d. patterning the masking layer (14) to expose at least the conductive layer (13) above the sacrificial part (12) thereby defining a plurality of electrodes (15) wherein the smallest distance (d1, d1') between the plurality of electrodes (15) is not larger than 500nm, thereafter e. etching the conductive layer (13) by ion-beam thereby forming the plurality of electrodes (15) comprising the noble metal, thereafter f. etching at least a portion of the sacrificial part (12) by dry etching such that the resistance at the smallest distance (d1, d1') between the plurality of electrodes (15) is at least 1e8 ohm, g. removing the masking layer (14). The present invention also relates to an electrode array (100) obtained by the method described in the present disclosure. The present invention also relates to an electroactive device for bio-material processing comprises the electrode array obtained by the method described in the present disclosure.

Anmelder

Firmen

IMEC VZW
Imec VZW

Land

🇧🇪 Belgien

Fachgebiete