Verfahren und Vorrichtung zur Beurteilung einer Probenoberfläche, Verfahren zum Scannen einer Probenoberfläche und Vorrichtung zur Beurteilung Geladener Teilchen

Details

Veröffentlichungs-Nr.

EP4575637

Aktenzeichen

EP23218493

Anmeldetag

20. Dezember 2023

Veröffentlichung

25. Juni 2025

Rechtsraum

EP

IPC

G03F7/00

Abstract

The present disclosure provides methods and apparatus relating to assessing a sample surface using charged particles. In one arrangement, a method comprises, at a first region of a sample surface on which is an intended pattern, relative scanning a beam over an elongate row portion of the intended pattern along a first direction to generate a row data set. At a second region of the sample surface on which is a repeat of the intended pattern, the beam is relative scanned over an elongate column portion of the intended pattern along a second direction to generate a column data set. The row data set and the column data set are processed to compare between the row data set and the column data set a common portion of the intended pattern to assess the common portion.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete