Elektrisches Verbindungssystem

EP4576149 Art A3 19. November 2025

Anmelder: ASML Netherlands B.V. 🇳🇱

Details

Veröffentlichungs-Nr.
EP4576149
Aktenzeichen
EP25174125
Anmeldetag
2. Mai 2025
Veröffentlichung
19. November 2025
Rechtsraum
EP
IPC
H01H35/32H01J37/04// H01H1/32
Offizieller Volltext

Abstract

An electrical connection system 300 comprising: a first body 310; a first electrical contact member 311 attached to the first body; a second body 320 movable relative to the first body; a second electrical contact member 321 attached to the second body; and a passive pneumatic actuator 322 configured to change length in a first direction in response to changes in the fluid pressure surrounding the pneumatic actuator; wherein, in a disconnected state, the pneumatic actuator has a first length whereby the first and second electrical contact members 311, 321 are not in electrical contact; wherein, in a connected state, the pneumatic actuator has a second length whereby the first and second electrical contact members 311, 321 are in electrical contact; wherein the system further comprises a first compliant member 315 through which the first electrical contact member 311 is attached to the first body 310, and the first compliant member 315 is configured to accommodate relative movements between the first and second bodies 310, 320 in a second direction different from the first direction.

Anmelder

Firma
ASML Netherlands B.V.
Land
🇳🇱 Niederlande
🇳🇱 ASML

Niederländisches Unternehmen, das Lithografiesysteme und weitere Anlagen für die Halbleiterfertigung entwickelt und herstellt, zentral für die Chipindustrie.

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