Element für Optische Strahlung

Details

Veröffentlichungs-Nr.

EP4593056

Aktenzeichen

EP25182767

Anmeldetag

13. Juni 2025

Veröffentlichung

24. Dezember 2025

Rechtsraum

EP

IPC

H01J37/22

Abstract

An optical beam member for a charged particle-optical device configured to direct a charged particle beam towards a sample location, the optical beam member comprising: a charged particle beam aperture for passage of the charged particle beam, an emitter arrangement associated with the charged particle beam aperture, the emitter arrangement configured to emit an optical radiation towards the sample location, and an optical source module comprising an optical source arrangement for providing an optical radiation input to the said emitter arrangement. An assembly comprising the optical beam member. A charged particle-optical device comprising the assembly. A method for directing optical radiation towards a sample location of a sample.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete