System und Verfahren zur Annäherung von Röntgenstrahlenintensitäten für eine mit einem Röntgenstrahldetektionssystem Gemessene Probe

Details

Veröffentlichungs-Nr.

EP4597090

Aktenzeichen

EP24155408

Anmeldetag

1. Februar 2024

Veröffentlichung

6. August 2025

Rechtsraum

EP

IPC

G01N23/2209G01N23/223

Abstract

System (100), method and computer program product for approximating one or more X-ray intensities for a sample (202) measured by an X-ray detection system (200-1) with at least one collimator (205, 206) having a given angular range, a monochromator (203) and an X-ray detector (204). Measured intensities (212) are received from the detection system (200-1) at respective one or more diffraction angles (θ). A sample simulation module (130) computes simulated sample intensities (112) from an X-ray fluorescence sample model (130M) with initial sample model parameters (130P) indicating the sample composition and/or layer thickness of one or more sample layers. A correction module (120) applies a triangular collimator correction (121) to the simulated sample intensities (112) and determines a mathematical distance between the corrected simulated sample intensities and corresponding measured intensities. The sample model parameters (130P) are adjusted and the correction steps are repeated until the distance change falls below a minimal distance change. Finally, the sample model parameters (130P) regarding sample composition and/or the layer thickness associated with the corrected simulated intensities (112-c) are provided as approximated concentration values of respective components contained in the measured sample (202) and/or the layer thickness of the measured sample.

Anmelder

Firma

Bruker AXS SE

Land

🇩🇪 Deutschland

Fachgebiete