System zur Messung von Wellenfrontaberrationen und Belichtungsvorrichtung

Details

Veröffentlichungs-Nr.

EP4600738

Aktenzeichen

EP25184990

Anmeldetag

24. Juni 2025

Veröffentlichung

13. August 2025

Rechtsraum

EP

IPC

G03F7/00

Abstract

A wavefront aberration measurement system for determining aberrations of a projection system is described, the system comprising: a first 2 dimensional grating, a second 2 dimensional grating, a radiation source configured to irradiate the first 2 dimensional grating, and a detector configured to detect radiation from the radiation source having in sequence interacted with the first 2 dimensional grating, the projection system and the second 2 dimensional grating and The system further comprises a control device configured to perform phase stepping by moving the first 2 dimensional grating and the second 2 dimensional grating in respect of each other along a diagonal of the first 2 dimensional grating and the second 2 dimensional grating with an alignment phase difference between the X-direction and the Y-direction, thereby obtaining detector data.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete