Hybride Mehrwellenlängenabtastung für Genauigkeitsverbesserungen

Details

Veröffentlichungs-Nr.

EP4600740

Aktenzeichen

EP25186484

Anmeldetag

30. Juni 2025

Veröffentlichung

11. März 2026

Rechtsraum

EP

IPC

G03F7/00

Abstract

There is provided a method of predicting a parameter of interest (POI) for each target of a first set of targets formed by a patterning process on a substrate comprising a plurality of targets comprising the first set of targets and a second set of targets. The method comprises obtaining i) a first dataset comprising, for each target of the second set, a respective POI value generated from metrology data obtained by a first metrology process, ii) obtaining a second dataset comprising, for each target of the first set and each target of the second set, a respective POI value generated from metrology data obtained by a second metrology process, and iii) processing the first dataset and the second dataset to predict the respective POI value for each target of the first set, wherein the predicted value is a prediction of the POI generated from metrology data obtained by applying the second metrology process to the first set of targets.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete