Verfahren zur Kalibrierung einer Abstimmbaren Lichtquelle in einem Interferometersystem

Details

Veröffentlichungs-Nr.

EP4607144

Aktenzeichen

EP25188063

Anmeldetag

8. Juli 2025

Veröffentlichung

14. Januar 2026

Rechtsraum

EP

IPC

G01B9/02004G01B9/02001G01B9/02055G03F7/00

Abstract

The present disclosure provides method of calibrating a tunable light source in an interferometer system, the method comprising the steps of: - simultaneously performing a frequency sweep with the tunable light source across at least one measurement axis and a reference axis of the interferometer system to obtain a frequency response; - obtaining a fit residual of the frequency response of the tunable light source; - obtaining a noise fingerprint of the fit residual; - correlating the noise fingerprint to a reference noise fingerprint; and - calibrating the tunable light source based on the correlation between the noise fingerprint and the reference noise fingerprint.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete