System mit Geladenem Teilchenstrahl und Verfahren zur Steuerung des Systems mit Geladenem Teilchenstrahl

Details

Veröffentlichungs-Nr.

EP4621825

Aktenzeichen

EP25162131

Anmeldetag

6. März 2025

Veröffentlichung

15. Oktober 2025

Rechtsraum

EP

IPC

H01J37/18H01J37/16H01J37/20H01J37/26

Abstract

A charged particle beam system includes: a sample chamber (202); a pre-evacuation chamber (232) that is connected to the sample chamber (202); a first evacuation pump (510) that has a first port (512) connected to the sample chamber (202), and a second port (514) connected to the pre-evacuation chamber (232); a second evacuation pump (520) that is connected to the pre-evacuation chamber (232), an evacuation port (516), and the sample chamber (202); and a controller (400) that controls the first evacuation pump (510) and the second evacuation pump (520), the controller (400) performing, when a sample (S) is introduced into the pre-evacuation chamber (232): a process of causing the second evacuation pump (520) to evacuate the pre-evacuation chamber (232); a process of making a determination of whether a vacuum degree inside the pre-evacuation chamber (232) has reached a first vacuum degree, based on power of the second evacuation pump (520); and a process of causing the first evacuation pump (510) to evacuate the pre-evacuation chamber (232) when the vacuum degree inside the pre-evacuation chamber (232) is determined to have reached the first vacuum degree.

Anmelder

Firma

Jeol Ltd.

Land

🇯🇵 Japan

Fachgebiete