Saugklemme zum Klemmen eines Substrats

Details

Veröffentlichungs-Nr.

EP4636483

Aktenzeichen

EP25197649

Anmeldetag

22. August 2025

Veröffentlichung

22. Oktober 2025

Rechtsraum

EP

IPC

G03F7/00

Abstract

A suction clamp for clamping a substrate, the suction clamp comprising a base; a substrate support extending perpendicular from the base in a first direction, the substrate support having a support area for supporting the substrate during clamping thereof; a resilient skirt member for receiving the substrate, wherein the skirt member extends around the substrate support; a fixing arrangement for removably fixing the skirt member to the base in an airtight manner; a suction opening arranged in the base and within a contour of the skirt member, the suction opening being adapted to be connected to a suction device for providing a suction force for clamping the substrate on the skirt member and the substrate support.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete