Belichtungsvorrichtung und Verfahren zur Durchführung eines Lithografischen Belichtungsverfahrens

Details

Veröffentlichungs-Nr.

EP4650872

Aktenzeichen

EP25205718

Anmeldetag

30. September 2025

Veröffentlichung

19. November 2025

Rechtsraum

EP

IPC

G03F7/00

Abstract

An exposure apparatus configured to perform a lithographic exposure process, comprising an actuator, and a control unit configured to control the actuator, the control unit comprising a trained machine learning model. The control unit is configured to determine, within a predetermined amount of time, a control setting for controlling the actuator by: obtaining a desired correction of the lithographic exposure process; determining an initial control setting for the actuator based on the desired correction of the lithographic exposure process; and iteratively refining the initial control setting to approach the desired correction of the lithographic exposure process, thereby obtaining the control setting for the actuator. The control unit is configured to determine the initial control setting for the actuator by providing the desired correction of the lithographic exposure process as input to the trained machine learning model.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete