Verfahren zur Bestimmung der Verschlechterung einer Sensorbezugsmarke

Details

Veröffentlichungs-Nr.

EP4660701

Aktenzeichen

EP24179978

Anmeldetag

4. Juni 2024

Veröffentlichung

10. Dezember 2025

Rechtsraum

EP

IPC

G03F7/00G03F9/00

Abstract

Disclosed is a method of determining a fiducial degradation metric for a sensor fiducial. The method comprises obtaining fiducial plane position data describing a position over a time period, and in a fiducial plane, of a plurality of marks on a fiducial surface; determining first fiducial position drift data from the fiducial plane position data, said first fiducial position drift data describing a temporal drift in measured positions within the fiducial plane position data; obtaining height data describing a position over said time period, and perpendicular to the fiducial plane, of the fiducial surface; determining second fiducial position drift data from said height data; and determining the fiducial degradation metric from said first fiducial position drift data and said second fiducial position drift data.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete