Positionsmesssystem und -Verfahren, Substratstufensystem und Belichtungsvorrichtung

Details

Veröffentlichungs-Nr.

EP4660702

Aktenzeichen

EP25207681

Anmeldetag

9. Oktober 2025

Veröffentlichung

10. Dezember 2025

Rechtsraum

EP

IPC

G03F7/00

Abstract

The present disclosure provides an object stage system, comprising: a balance mass having a top surface, a bottom surface, and one or more side surfaces; at least one object table movable with respect to said top surface; at least one object table follower movable with respect to a side of the balance mass and supporting a cable slab connected to a corresponding object table; a first position measurement system for measuring a first position of the at least one object table relative to the top surface in six degrees of freedom, and a second position measurement system for measuring a second position of the object table follower relative to the balance mass in six degrees of freedom.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete