Bestimmung Geometrischer Eigenschaften sowie Bestimmung von Materialeigenschaften einer Probe

Details

Veröffentlichungs-Nr.

EP4667866

Aktenzeichen

EP25213250

Anmeldetag

4. November 2025

Veröffentlichung

24. Dezember 2025

Rechtsraum

EP

IPC

G01B11/00G01B11/16G01B11/30

Abstract

An apparatus configured for determining geometric surface properties and for determining material properties of a same measuring region of a sample to be investigated, the apparatus comprising an illumination device arranged for illuminating a measuring region of the sample, an elastic camera system for determining the geometric surface properties of said sample in the measuring region by capturing light elastically scattered from the sample in the measuring region, an inelastic camera system for determining material properties of the sample in the measuring region by capturing light inelastically scattered from the sample in the measuring region and optics arranged to guide light elastically and inelastically scattered from the sample in the measuring region to the elastic camera system and the inelastic camera system, respectively.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete