Verfahren zur Elektronenenergieverlustspektroskopie bei Hohen Energieverlusten mit Magnetischem Immersionsobjektiv

Details

Veröffentlichungs-Nr.

EP4712126

Anmeldetag

8. September 2025

Veröffentlichung

18. März 2026

Rechtsraum

EP

IPC

H01J37/26

Abstract

Systems, devices, methods, algorithms, and techniques for energy-loss spectroscopy at relatively large energy losses are described. A method includes modifying an accelerating voltage of a source of the system from a first energy to a second energy. The method can include modifying one or more optical elements of the system, in accordance with a calibration for the second energy. The method can include generating a set of operating conditions for a projection optics system. The method can include modifying one or more elements of the projection optics system in at least partial accordance with the set of operating conditions. The method can include modifying a condenser lens of the system in accordance with focusing a beam of charged particles onto a sample position. The method can also include modifying the accelerating voltage from the second energy to the first energy.

Anmelder

Firma

FEI COMPANY

Land

🇺🇸 USA

Fachgebiete