Übertragungssystem für Lichtemittierende Elemente und Verfahren dafür

Details

Veröffentlichungs-Nr.

EP4712754

Anmeldetag

8. September 2025

Veröffentlichung

18. März 2026

Rechtsraum

EP

Abstract

A light emitting element transfer device includes a vacuum chamber for creating or removing a vacuum atmosphere inside, an alignment stage disposed inside the vacuum chamber and movable in three axes, a bonding stage disposed inside the vacuum chamber and movable up and down, a portable chuck having a built-in heater and selectively connectable with the alignment stage and the bonding stage and a chuck holder coupled with the portable chuck and movable between the alignment stage and the bonding stage inside the vacuum chamber, where the portable chuck is engaged with the chuck holder to chuck a first substrate on a top surface of the portable chuck and is detached from the chuck holder to de-chucking the first substrate from the top surface.

Anmelder

Firma

Samsung Display Co., Ltd.

Land

🇰🇷 Südkorea