Entlüftungsvorrichtung, Substratverarbeitungsvorrichtung Damit, Entlüftungsverfahren und Flüssigkeitszufuhrverfahren

Details

Veröffentlichungs-Nr.

EP4714519

Anmeldetag

12. September 2025

Veröffentlichung

25. März 2026

Rechtsraum

EP

IPC

B01D19/00(SAIKI KAZUYUKI et al.)

Abstract

A deaeration apparatus of the present invention includes a tank (11) that stores a liquid to be deaerated, a circulation pipe having one end connected to an outflow port of the tank and the other end connected to an inflow port of the tank, a pump (15) that is provided in the circulation pipe and sucks and feeds the liquid in the tank, and a foaming device (6a) that is provided in the circulation pipe and causes the liquid to flow through a throttle portion having a narrowed flow path section to generate air bubbles from the liquid, wherein deaeration of the liquid stored in the tank (11) is performed by circulating the liquid between the tank (11) and the foaming device (6a).

Anmelder

Firma

SCREEN Holdings Co., Ltd.

Land

🇯🇵 Japan