Ozonversorgungsvorrichtung und Ozonversorgungsverfahren

Details

Veröffentlichungs-Nr.

EP4714901

Anmeldetag

19. Mai 2023

Veröffentlichung

28. November 2024

Rechtsraum

EP

IPC

C01B13/11C01B13/10

Abstract

An ozone supply apparatus (100) includes an ozone pipe (10) connecting an ozone generator (6) and an adsorption tower (7); a decompression circuit (30) including a vacuum pump (12) discharging gas sucked from a suction port (121) from a discharge port (122), a primary pipe (15) connecting the suction port (121) to the ozone pipe (10), and a secondary pipe (19) connected to the discharge port (122), and sucking ozone gas desorbed from an adsorbent (7a) from inside of the adsorption tower (7); a dilution circuit (40) mixing dilution air into ozone gas flowing through the decompression circuit (30); a first flow meter (14) installed in the decompression circuit (30); a second flow meter (16) and a flow rate adjustment valve (17) installed in the dilution circuit (40); a pressure gauge (13) installed in the adsorption tower (7); and a control device (18) adjusting an opening degree of the flow rate adjustment valve (17) such that an estimated value of the ozone concentration of ozone gas discharged from the vacuum pump (12) to the secondary pipe (19) becomes a target value.

Anmelder

Firma

Mitsubishi Electric Corporation

Land

🇯🇵 Japan

Fachgebiete