Turbomolekulare Vakuumpumpe

Details

Veröffentlichungs-Nr.

EP4715217

Anmeldetag

22. September 2025

Veröffentlichung

25. März 2026

Rechtsraum

EP

IPC

F04D19/04, F04D29/54

Abstract

A turbomolecular vacuum pump is disclosed. The turbomolecular vacuum pump comprises a rotor comprising a plurality of axially spaced rotor blade rows; a stator comprising a plurality of stator blade rows comprising multiple blades and an outer annular portion for axially spacing the multiple blades of adjacent stator blade rows; and a housing comprising an inner side wall surrounding an outer surface of the stator blade rows. The plurality of rotor blade rows and the plurality of stator blade rows comprise blade rows of at least two different diameters, larger diameter blade rows being towards the inlet of the turbomolecular vacuum pump. The housing comprises at least two portions, the at least two portions comprising inner cylindrical surfaces of different diameters, the diameters of the portions decreasing from the inlet to the outlet. The stator blade rows are mounted between inlet and outlet radially extending surfaces of the housing; and at least one intermediate stator blade row is mounted on a corresponding at least one intermediate radially extending surface of the housing. A contact surface area between the at least one intermediate stator blade row and the at least one intermediate radially extending surface is at least 10% higher than a contact surface area between an inlet stator blade row and the inlet radially extending surface.

Anmelder

Firma

Leybold GmbH

Land

🇩🇪 Deutschland