Totman, Clare Elizabeth

Magnet assembly for an eddy current damper of a vacuum pump, comprising a hub to be connected to or integral with a rotor shaft of the vacuum pump, one or more ring magnets surrounding the hub, cover discs directly connected to the hub and arranged on both axial sides of the one or more ring magnets, and a sleeve surrounding the one or more ring magnets and being in direct contact with the radial outer surface of the ring magnet, wherein by the sleeve, the hub and the cover discs a sealed encapsulation for the one or more ring magnets is provided.

A turbomolecular vacuum pump is disclosed. The turbomolecular vacuum pump comprises a rotor comprising a plurality of axially spaced rotor blade rows; a stator comprising a plurality of stator blade rows comprising multiple blades and an outer annular portion for axially spacing the multiple blades of adjacent stator blade rows; and a housing comprising an inner side wall surrounding an outer surface of the stator blade rows. The plurality of rotor blade rows and the plurality of stator blade rows comprise blade rows of at least two different diameters, larger diameter blade rows being towards the inlet of the turbomolecular vacuum pump. The housing comprises at least two portions, the at least two portions comprising inner cylindrical surfaces of different diameters, the diameters of the portions decreasing from the inlet to the outlet. The stator blade rows are mounted between inlet and outlet radially extending surfaces of the housing; and at least one intermediate stator blade row is mounted on a corresponding at least one intermediate radially extending surface of the housing. A contact surface area between the at least one intermediate stator blade row and the at least one intermediate radially extending surface is at least 10% higher than a contact surface area between an inlet stator blade row and the inlet radially extending surface.

A turbomolecular vacuum pump rotor blade row for a turbomolecular vacuum pump having a rotor shaft to which, in use, the rotor blade row is coupled; the rotor blade row comprising: an injection-moulded rotor blade row body including a substantially annular hub and an array of rotor blades, the rotor blade row body being substantially formed of a fibre-reinforced polymer; an insert for reinforcing the annular hub; wherein the insert is substantially formed of a fibre-reinforced polymer having a substantially circumferential fibre distribution; and wherein the insert is integrally formed with the rotor blade row body.

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