Substratfördervorrichtung und Positionslehrverfahren

Details

Veröffentlichungs-Nr.

EP4716441

Anmeldetag

18. Juli 2025

Veröffentlichung

25. März 2026

Rechtsraum

EP

IPC

H10P72/00, H10P72/30(KUWAHARA JOJI et al.)(ENOMOTO TADASHI et al.)

Abstract

An imaging unit 55 captures an image of a hand unit 43 at a reference position Bs and an image of the hand unit 43 at an advanced position Cs where the hand unit 43 has advanced from the reference position Bs by an advanced amount P1. A position calculation unit 73 calculates an estimated moving amount L1 of the hand unit 43 from each image. A correction coefficient calculation unit 74 calculates a correction coefficient Mk based on the advanced amount P1 and the estimated moving amount L1. A calibration unit 75 calculates a calibrated moving amount H by calibrating a necessary moving amount E calculated based on an image of a conveyance target object with the correction coefficient Mk. Since the calibration unit 75 calibrates a difference between the advanced amount P1 and the estimated moving amount L1, the difference caused by the imaging unit 55 and optical images 81,82 can be eliminated in a configuration in which a position of a conveyance destination using optical images 81,82 captured by the imaging unit 55.

Anmelder

Firma

SCREEN Holdings Co., Ltd.

Land

🇯🇵 Japan