Substratverarbeitungsvorrichtung

Details

Veröffentlichungs-Nr.

EP4716442

Anmeldetag

1. August 2025

Veröffentlichung

25. März 2026

Rechtsraum

EP

IPC

H10P72/00(KOMIYA HIROSHI et al.)

Abstract

A substrate processing apparatus includes a front block, a cabinet portion, and a rear block. The front block includes a chamber. The rear block includes a chamber. The cabinet portion includes a processing liquid container, a pipe, and a liquid feeder. The processing liquid container stores a processing liquid. The pipe connects the processing liquid container and the chamber of the front block. The liquid feeder is provided on the pipe. The front block, the cabinet portion, and the rear block are arranged in this order in a front-rear direction.

Anmelder

Firma

SCREEN Holdings Co., Ltd.

Land

🇯🇵 Japan