Substratverarbeitungsvorrichtung und Substratverarbeitungsverfahren

Details

Veröffentlichungs-Nr.

EP4716443

Anmeldetag

4. August 2025

Veröffentlichung

25. März 2026

Rechtsraum

EP

IPC

H10P72/00

Abstract

The present invention relates to a substrate processing apparatus and a substrate processing method. A substrate processing apparatus includes a first front portion, a first rear portion, and a bridge portion that are arranged in this order in a front-rear direction. The first front portion includes a plurality of processing units. The first front portion includes a transport mechanism that transports a substrate to the processing units of the first front portion. The first rear portion includes a plurality of processing units. The first rear portion includes a transport mechanism that transports the substrate to the processing units of the first rear portion. The bridge portion includes the transport mechanism that places the substrate in the first front portion and the first rear portion.

Anmelder

Firma

SCREEN Holdings Co., Ltd.

Land

🇯🇵 Japan