Substratverarbeitungsvorrichtung und Substratverarbeitungsverfahren

Details

Veröffentlichungs-Nr.

EP4716444

Anmeldetag

4. August 2025

Veröffentlichung

25. März 2026

Rechtsraum

EP

IPC

H10P72/00

Abstract

The present invention relates to a substrate processing apparatus and a substrate processing method. A substrate processing apparatus includes an indexer portion, a slider portion, a bridge portion, a first front portion, and a first rear portion. The indexer portion, the slider portion, and the bridge portion are arranged in this order in a front-rear direction. The first front portion, the bridge portion, and the first rear portion are arranged in this order in the front-rear direction. The slider portion transports a substrate between the indexer portion and the bridge portion. The bridge portion transports the substrate between the slider portion and the first front portion. The bridge portion transports the substrate between the slider portion and the first rear portion. The first front portion includes a plurality of processing units. The first front portion includes a transport mechanism. The first rear portion includes a plurality of processing units. The first rear portion includes a transport mechanism. The slider portion overlaps with the processing units of the first front portion in plan view.

Anmelder

Firma

SCREEN Holdings Co., Ltd.

Land

🇯🇵 Japan