Dreiachsiges Mikroelektromechanisches Gyroskop mit Verbesserten Leistungen

Details

Veröffentlichungs-Nr.

EP4718026

Anmeldetag

24. September 2025

Veröffentlichung

1. April 2026

Rechtsraum

EP

IPC

G01C19/5712(PRUETZ ODD-AXEL et al.)(SENKAL DORUK et al.)

Abstract

A MEMS gyroscope is described, having a microelectromechanical structure (10) with a main extension in a horizontal plane (xy) formed by a first and a second horizontal axes (x, y) and provided with: at least one first driving mass (12,D1) that performs a translation driving movement along the second horizontal axis (y) of the horizontal plane (xy); and at least one first sensing mass (14,P1), having an anchoring element (16) arranged centrally with respect to the same first sensing mass (14,P1) and connected to the anchoring element (16) by an elastic arrangement (18); wherein the first sensing mass (14,P1) is coupled to the first driving mass (12,D1) by an elastic coupling element (20) and performs a rotation movement in the horizontal plane (xy) around the anchoring element (16), dragged by the first sensing mass (12,D1), and a sensing movement of rotation outside the horizontal plane (xy) around a rotation axis (A) defined by the elastic arrangement (18), in response to a first angular velocity around the first horizontal axis (x). The rotation axis (A) extends along the second horizontal axis (y), parallel to the translation driving movement.

Anmelder

Firma

STMicroelectronics International N.V.

Land

🇨🇭 Schweiz