Kompensator für Interne Elektromagnetische Interferenz in Sem-Basierter Wechselstromsondierung

Details

Veröffentlichungs-Nr.

EP4718090

Anmeldetag

14. Juli 2025

Veröffentlichung

1. April 2026

Rechtsraum

EP

IPC

G01R31/307

Abstract

Disclosed herein are devices, systems, and methods for cancelling an internal magnetic field caused by a test signal within a test chamber of a scanning electron microscope (SEM). A compensator device includes a set of one or more wire loops around a test chamber and an amplifier configured to drive a current in each wire loop of the set of one or more wire loops. The compensator device also includes a control circuit configured to adjust, via the amplifier, a corresponding amplitude modulation of the current in each wire loop, wherein the control circuit is configured to adjust the corresponding amplitude modulation based on a test signal within the test chamber.

Anmelder

Firma

INTEL Corporation

Land

🇺🇸 USA

Fachgebiete