Fabry-Perot-Interferenzfilter

Details

Veröffentlichungs-Nr.

EP4718139

Anmeldetag

9. April 2024

Veröffentlichung

23. Januar 2025

Rechtsraum

EP

IPC

G02B26/00

Abstract

A Fabry-Perot interference filter includes a first laminated body having a first mirror portion, and a second laminated body having a second mirror portion that faces the first mirror portion with a gap interposed therebetween. A reference laminated body, which is one of the first laminated body and the second laminated body, includes a first low-resistance layer, a second low-resistance layer, and a first insulating layer disposed between the first low-resistance layer and the second low-resistance layer. The resistivity of the material constituting the first low-resistance layer and the second low-resistance layer is lower than the resistivity of the material constituting the first insulating layer. The first insulating layer includes a first main body portion located on the first low-resistance layer, a first covering portion covering an outer edge of the first low-resistance layer, and a first peripheral portion located outside the first low-resistance layer. The first main body portion, the first covering portion, and the first peripheral portion are integrally formed.

Anmelder

Firma

Hamamatsu Photonics K.K.

Land

🇯🇵 Japan