Massenspektrometer

Details

Veröffentlichungs-Nr.

EP4718497

Anmeldetag

15. April 2024

Veröffentlichung

28. November 2024

Rechtsraum

EP

IPC

H01J49/24, H01J49/26

Abstract

Provided is a mass spectrometer capable of ensuring a work space for maintenance or the like of a turbomolecular pump as compared with one in the related art. A mass spectrometer 10, 10A, 10B includes: an ion source 30; a vacuum chamber 40 into which a sample ion ionized by the ion source 30 is introduced; and a turbomolecular pump 50, 50A, 50B configured to maintain the vacuum chamber 40 in a vacuum. The turbomolecular pump 50, 50A, 50B is provided above the vacuum chamber 40 in a vertical direction.

Anmelder

Firma

HITACHI HIGH-TECH CORPORATION

Land

🇯🇵 Japan