Elektroakustischer Wandler mit Elektrischen Anschlüssen auf einer Membran

Details

Veröffentlichungs-Nr.

EP4718875

Anmeldetag

19. September 2025

Veröffentlichung

1. April 2026

Rechtsraum

EP

IPC

H04R17/00

Abstract

A microelectromechanical electroacoustic transducer includes: a supporting frame (12) containing semiconductor material; a membrane (13) of semiconductor material connected to the supporting frame (12) along a perimeter; a central piezoelectric transducer (15) on a central portion (13b) of the membrane (13); elastic elements (17), defined by respective portions of the membrane (13), the central portion (13b) of the membrane (13) being connected to the supporting frame (12) by elastic elements (17); and metal lines (30, 35, 36) extending on respective elastic elements (17) and on the central portion (13b) of the membrane (13) from the elastic elements (17) to the central piezoelectric transducer (15). The metal lines (30, 35, 36) are of a metal immune to oxidation by exposure to the atmosphere.

Anmelder

Firma

STMicroelectronics International N.V.

Land

🇨🇭 Schweiz