Pbn-Behälter und Verfahren zur Herstellung des Pbn-Behälters

Details

Veröffentlichungs-Nr.

EP4722408

Anmeldetag

6. Mai 2025

Veröffentlichung

8. April 2026

Rechtsraum

EP

IPC

(MORIKAWA YUJI et al.)(SHINETSU CHEMICAL CO et al.)

Abstract

The present invention is a PBN container including a container body made of a laminate of pyrolytic boron nitride, and a conductive film coating a surface of the container body, in which an angle θ between a cut face of the container body and an inner wall surface or an outer wall surface of the container body adjacent to the cut face is 20° or more and 80° or less across an entire circumference of an aperture of the container body, and a tip portion of the aperture of the container body has a shape having a curvature radius R of 0.2 mm or more and 3.0 mm or less across the entire circumference of the aperture of the container body. This provides the PBN container excellent in durability where the conductive film is laminated on a surface of the container body formed by depositing PBN, and the method for producing such a PBN container.

Anmelder

Firma

Shin-Etsu Chemical Co., Ltd.

Land

🇯🇵 Japan