Kapazitives Mems-Gyroskop

Details

Veröffentlichungs-Nr.

EP4722648

Anmeldetag

7. Oktober 2024

Veröffentlichung

8. April 2026

Rechtsraum

EP

IPC

G01C19/5776

Abstract

The disclosure relates to a MEMS gyroscope comprising a moving structure, a first stator, and a second stator to which a supplementary voltage signal is applied. The moving structure and the first stator form a first capacitor, and the moving structure and the second stator form a second capacitor. The moving structure is configured to move so that a capacitance of the first capacitor increases when a capacitance of the second capacitor decreases. The advantage of this arrangement is that the undesired AC current component induced by the driving signal is reduced without adding a second noisy drive electrode to the gyroscope.

Anmelder

Firma

Murata Manufacturing Co., Ltd.

Land

🇯🇵 Japan